Nanoporous SiO2/Si thin layers produced by ion track etching: Dependence on the ion energy and criterion for etchability
نویسندگان
چکیده
منابع مشابه
Heavy Ion Track-Etching of PEEK Membranes
Heavy ion tracks in polymer membranes can be transformed into microand nano-channels by means of wet-chemical etching. Up to now most commonly polycarbonate (PC), polyethylene therephthalate (PET) and polyimide (PI) membranes were employed for this purpose. For some applications such as proton conductive membranes for fuel cells, high resistance of the material against heat and solvents as well...
متن کاملInfluence of asymmetric etching on ion track shapes in polycarbonate
By combining low-energy ion irradiation with asymmetric etching, conical nanopores of controlled geometry can be etched in polycarbonate (PC). Cone bases vary from 0.5 to 1μm. Top diameters down to 17 nm are reached.. When etching from one side, the pH on the other side (bathed in neutral or acidic buffer) was monitored. Etching temperature ranged from 65°C to 80°C. Pore shape characterization ...
متن کاملHigh-sensitivity ion track-etching of poly(vinylidene fluoride) membranes
Quite recently, ion-track membranes of poly(vinylidene fluoride) (PVDF) have attracted a renewed interest for their applications to next-generation electrochemical devices such as fuel cells [1,2]. In order to produce tracketched pores in PVDF films, several kinds of etching solutions were previously employed. In most cases [3], a highly concentrated aqueous KOH solution with a KMnO4 additive w...
متن کاملReactive ion etching
The reactive ion etching ofInP, InGaAs, and InAIAs in CClzF2/02 or C2R(/H2 discharges was investigated as a function of the plasma parameters pressure, power density, flow rate, and relative composition. The etch rates of these materials are a factor of 3-5 X faster in CC12F 2/0 2 (-600--1000 AminJ ) compared to CzHJH2 (160-320 AminI ). Significantly smoother morphologies are obtained with C2H6...
متن کاملInfluence of a surfactant on single ion track etching: Preparing and manipulating cylindrical micro wires
The influence of the alkali resistant surfactant Dowfax 2A1 on single ion track etching in 30 lm polycarbonate foils is studied at low etch rate (5 M NaOH at 41.5 ± 2 C) using electro conductivity measurements. At surfactant concentrations above 10 4 vol.% breakthrough times are predictable (Dt/t < 0.25). At high surfactant concentrations (P0.1 vol.%) the formation of cylindrical channels is fa...
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ژورنال
عنوان ژورنال: Journal of Applied Physics
سال: 2008
ISSN: 0021-8979,1089-7550
DOI: 10.1063/1.2957052